Taw qhia
Nrog rau txoj kev loj hlob sai ntawm cov cuab yeej technology, yuav tsum muaj kev sib zog, ua haujlwm zoo dua, me me, ntau yam khoom siv thiab cov khoom siv laser zoo rau cov khoom siv hluav taws xob, kev kho mob, biology thiab cov ntaub ntawv. Tam sim no cov lasers muaj nyob rau hauv infrared thiab pom wavelengths. Cov cuab yeej laser tsoos, cov txheej txheem thiab thev naus laus zis raug kev txom nyem los ntawm kev ua haujlwm qis, kev ua haujlwm nyuaj, cov nqi siab, txwv ntau, kev poob loj thiab qhov tseeb tsawg. UV lasers tau rov tshawb nrhiav los ntawm cov kws tshawb fawb hauv xyoo tas los no rau lawv cov kev sib raug zoo, kev yooj yim, kev ruaj ntseg thiab kev ntseeg siab, tus nqi qis, tunability, me me, kev ua haujlwm siab, qhov tseeb thiab kev ua tau zoo.
2. UV lasers
UV lasers feem ntau muab faib ua roj UV lasers thiab khoom UV khoom lub xeev lasers. Qhov nruab nrab ua haujlwm tau ncav cuag lub xeev zoo siab los ntawm kev nqus lub zog sab nraud nyob rau hauv qhov kev txiav txim ntawm lub twj tso kua mis, thiab tom qab lub particle tooj inversion nce ntau dua qhov poob, lub teeb yog amplified thiab ib feem ntawm lub teeb amplified yog pub rov qab mus ntxiv qhov excitation li no. generating oscillation nyob rau hauv lub resonant kab noj hniav los tsim lub laser. Gas media yog tsuas yog siv nyob rau hauv pulsed los yog electron beam discharges, qhov twg kev sib tsoo ntawm electrons excite cov roj hais los ntawm cov uas tsis muaj zog theem mus rau siab zog mus rau lub siab dhia dhia kom tau UV lasers. Cov khoom nruab nrab yog ib qho uas tsis yog-linear zaus ob zaug siv lead ua uas ua rau sab nraud radiating UV laser teeb tom qab ib lossis ntau zaus hloov. Excimer thiab all-solid-state UV lasers feem ntau siv rau kev ua laser thiab tuav.
2.1. Excimer lasers
Lub ntsiab roj UV lasers yog excimer lasers, argon ion lasers, nitrogen molecular lasers, fluorine molecular lasers, helium cadmium lasers, thiab lwm yam Excimer lasers thiab lwm yam yog feem ntau siv rau laser ua. Excimer lasers yog cov roj lasers nrog excimer ua cov khoom ua haujlwm. Lawv kuj yog cov lasers pulsed thiab tau muaj kev tshawb fawb zoo heev txij li thawj excimer laser tau tsim nyob rau hauv 1971. Excimer yog ib qho tsis ruaj tsis khov molecule uas tawg mus rau hauv atoms nyob rau hauv qee qhov xwm txheej. Repetition zaus thiab nruab nrab lub zog yog lub hauv paus rau kev txiav txim excimer lasers. Ib qho kev faib ua feem ntawm cov pa roj tsawg xws li Ar, Kr thiab Xe sib xyaw nrog cov ntsiab lus halogen xws li F, Cl thiab Br yog cov khoom siv tseem ceeb ntawm UV roj lasers, uas yog siv los ntawm cov kab hluav taws xob los yog cov pa tawm. Thaum cov atoms ntawm noble thiab tsis tshua muaj gases nyob rau hauv lub xeev hauv av zoo siab heev, cov electrons sab nraum lub nucleus yog li zoo siab rau siab dua orbitals kom lub sab nrauv electron txheej tau sau thiab ua ke nrog rau lwm cov atoms los tsim quasi-molecules, uas ces dhia rov qab mus rau lub sab sauv txheej ntawm lub electron. hauv av xeev thiab tawg mus rau hauv cov thawj atoms. Liquid xenon yog cov khoom ua haujlwm rau cov excimer lasers thaum ntxov. Niaj hnub no cov excimer lasers kuj suav nrog ArF laser ntawm 193 nm, KrF laser ntawm 248 nm thiab XeCl laser ntawm 308 nm.
2.2. Solid-state UV lasers
Qhov zoo tshaj plaws ntawm txhua lub xeev UV lasers yog lawv qhov yooj yim me me, kev ntseeg siab thiab kev ua haujlwm ruaj khov. Feem ntau siv yog Nd:YAG siv lead ua li niaj zaus rau LD siv, uas yog ces zaus ob npaug.
Cov kauj ruam tseem ceeb nyob rau hauv lub cim ntawm ib tug UV solid-state laser yog thawj zaug siv lub teeb qhov chaw nyob rau hauv lub laser mus rau lub intensifier nruab nrab mus cuag particle tooj inversion, tsim thiab oscillation ntawm lub hauv paus liab teeb nyob rau hauv lub resonant kab noj hniav, ces tus ob npaug ntawm qhov zaus hauv cov kab noj hniav los ntawm ib lossis ntau dua uas tsis yog-linear siv lead ua, thiab thaum kawg cov zis ntawm qhov xav tau UV laser los ntawm cov kab noj hniav resonant tom qab kis tau tus mob thiab xav txog. UV solid-state lasers feem ntau tau txais los ntawm kev siv LD diode siv thiab teeb siv txoj hauv kev. All-solid-state UV lasers yog LD-pumped UV solid-state lasers.
Nd: YAG (neodymium doped yttrium aluminium garnet) thiab Nd: YVO4 (neodymium doped yttrium vanadate) yog ob hom kev siv dag zog ntau dua. Ib txoj hauv kev los txhim kho cov kab noj hniav yog siv lub me me semiconductor laser diode LD pumped nrog Nd: YVO4 laser siv lead ua ntawm lub wavelength ntawm 808 nm los tsim nyob ze infrared teeb ntawm 1064 nm. Piv rau Nd:YAG, Nd:YVO4 laser siv lead ua muaj qhov loj dua hla ntu, plaub npaug ntawm Nd:YAG, qhov loj dua qhov nqus coefficient, tsib npaug ntawm Nd:YAG, thiab qis dua laser. Piv rau Nd:YAG, Nd:YVO4 laser siv lead ua muaj qhov loj dua hla ntu, plaub npaug ntawm Nd:YAG, qhov loj dua qhov nqus coefficient, tsib npaug ntawm Nd:YAG, thiab qis dua laser. Nd: YAG crystals muaj lub zog txhua yam, lub teeb kis tau tus mob siab, lub neej ntev fluorescence thiab tsis tas yuav muaj cua sov thiab cua txias.
3. Kev siv ntawm UV lasers
UV laser processing muaj ntau yam zoo thiab tam sim no yog cov cuab yeej ntawm kev xaiv hauv kev tsim cov ntaub ntawv thev naus laus zis. Ua ntej, UV laser tuaj yeem tso tawm ultra-luv wavelengths ntawm lub teeb laser, uas tuaj yeem cuam tshuam nrog ultra-me me thiab cov ntaub ntawv zoo; thib ob, "kev kho mob khaub thuas" ntawm UV laser tsis rhuav tshem cov khoom nws tus kheej tag nrho, tab sis tsuas yog kho nws qhov chaw; Tsis tas li ntawd, tsis muaj qhov cuam tshuam ntawm thermal puas. Qee cov ntaub ntawv tsis nqus pom thiab infrared lasers zoo, ua rau lawv ua tsis tau. Qhov zoo tshaj plaws ntawm UV yog qhov pib tag nrho cov ntaub ntawv nqus UV teeb ntau dua. UV lasers, tshwj xeeb tshaj yog solid-state UV lasers, yog compact thiab me me, yooj yim los tswj thiab yooj yim los tsim nyob rau hauv ntau qhov ntau. UV lasers yog siv nyob rau hauv ib tug ntau yam ntawm daim ntaub ntawv nyob rau hauv kev kho mob biomaterials, forensics nyob rau hauv criminal plaub ntug, integrated circuit boards, lub semiconductor kev lag luam, micro-optical Cheebtsam, phais, kev sib txuas lus thiab radar, thiab laser ua thiab txiav.
3.1. Kev hloov kho ntawm qhov chaw ntawm cov khoom siv roj ntsha
Hauv qee qhov kev kho mob, ntau cov ntaub ntawv kho mob yuav tsum tau sib haum nrog tib neeg cov ntaub so ntswg lossis txawm tias kho, xws li ultraviolet laser kho ntawm cov kab mob hauv lub cev thiab kev sim ntawm luav corneas uas qee zaum xav tau kev hloov pauv hauv cov khoom siv roj ntsha thiab cov qauv biomolecular. Tom qab kho qhov pom ntawm cov mem tes tsis zoo ntawm excimer UV laser, cov kws sim sim tom qab ntawd irradiated saum npoo ntawm biomaterials kho mob nrog 100 nm, 120 nm thiab 200 nm lasers raws li, yog li txhim kho cov qauv physicochemical ntawm cov khoom nto thiab tsis hloov tag nrho cov qauv tshuaj. cov khoom siv, thiab ua rau cov organic biomaterials kho tau ntau tshaj thiab hydrophilic nrog tib neeg cov ntaub so ntswg los ntawm kev sib piv thwmsim nrog kab lis kev cai kab mob hlwb, uas yog ib tug zoo pab nyob rau hauv kev kho mob biological daim ntaub ntawv.
3.2. Hauv kev tshawb nrhiav kev ua txhaum cai
Hauv kev tshawb nrhiav kev ua txhaum cai, cov ntiv tes tau siv los ua cov pov thawj tseem ceeb hauv kev ua txhaum cai los ntawm cov neeg ua txhaum cai vim nws tau pom tias cov ntiv tes yog qhov tshwj xeeb zoo li DNA. Thaum cov txheej txheem qub tuaj yeem ua rau cov qauv kev puas tsuaj thiab ua rau nws nyuaj rau kev sau thiab khaws cov khoom pov thawj. Cov kev tshawb fawb tam sim no muaj cov txiaj ntsig zoo rau cov khoom tsis nkag mus rau qhov chaw ntiv tes, xws li daim kab xev, duab, iav, thiab lwm yam tshwm sim. UV luminescence imaging" thiab "UV laser reflectance imaging" yog siv los soj ntsuam thiab sau cov kev tshawb pom thiab sau cov ntiv tes los ntawm UV laser irradiation ntawm cov ntiv tes uas muaj peev xwm los ntawm band-pass lim ntawm 266 nm thiab 340 nm feem. Kev sim nyob rau hauv qhov kev sim tau ua tiav tiav. Cov txheej txheem UV luv-yoj ua kom muaj kev vam meej ntawm cov ntiv tes muaj peev xwm, thiab qhov yooj yim thiab ceev uas cov khoom siv kho qhov muag tuaj yeem tswj tau ua rau nws cog lus rau kev siv hauv tsev hais plaub. exfoliated cells, bloodstains, plaub hau nrog cov hauv paus plaub hau thiab lwm yam kab mob lom tuaj yeem kuaj pom nrog UV kuaj. Txawm li cas los xij, thaum lub sijhawm luv-yoj 266 nm UV laser tau siv los irradiate lom cov qauv ntawm qhov kev ncua deb thiab ntawm lub sijhawm sib txawv thiab tom qab ntawd muab rho tawm. DNA, nws tau pom tias qhov luv-yoj 266 nm UV laser muaj qhov cuam tshuam loj rau DNA cov txiaj ntsig ntawm tsib hom pov thawj lom neeg: cov ntiv tes, b loodstains, qaub ncaug me ntsis, los ntawm cov hlwb thiab cov plaub hau nrog cov hauv paus plaub hau, tab sis tsuas yog rau qhov tsawg dua ntawm kev tshawb nrhiav cov roj ntsha DAN rau cov plaub hau suav nrog cov hauv paus plaub hau, qaub ncaug thiab cov ntshav. Luv-yoj UV lasers tuaj yeem cuam tshuam qee qhov DNA biomaterials, yog li cov txheej txheem rho tawm yuav tsum tau ua tib zoo xaiv rau nws cov txiaj ntsig pov thawj thaum tshawb nrhiav kev tshawb fawb.
3.3. UV laser daim ntawv thov ntawm kev sib koom ua ke hauv Circuit Court boards
Kev tsim tawm ntawm ntau yam ntawm Circuit Court boards hauv kev lag luam, los ntawm kev pib xaim mus rau kev tsim cov khoom me me precision embedded chips xav tau cov txheej txheem siab, hloov tau yooj yim hauv Circuit Court boards, laminated circuits hauv polymers thiab tooj liab tag nrho yuav tsum tau micro-qhov drilling thiab txiav, nrog rau kev kho thiab tshuaj xyuas cov ntaub ntawv ntawm cov laug cam, feem ntau yuav tsum tau siv cov micro-fabrication thiab ua. Laser micromachining thev naus laus zis yog qhov kev xaiv zoo tshaj plaws rau kev ua cov khoom siv hluav taws xob. Lub laser tsis tuaj rau hauv kev sib cuag nrog cov khoom yuav tsum tau ua thaum lub sij hawm tus txheej txheem, zoo zam txhua yam quab yuam, uas ua rau kom ceev ceev, yooj yooj yim thiab tsis muaj tshwj xeeb yuav tsum tau rau qhov chaw ua hauj lwm, uas muaj peev xwm ncav cuag sub-micron magnitudes los ntawm qhov tseeb qhov chaw ntawm laser. parameters thiab kev tshawb fawb tsim. Cov txheej txheem drilling ntau dua siv nyob rau hauv Circuit Court boards yog kev siv UV lasers thiab CO2 lasers rau cov cim tsis yog xim hlau (CO2 lasers nrog lub wavelength ntawm 10.6 μm yog siv los kos cov ntaub ntawv tsis yog xim hlau; wavelengths ntawm 1064 nm lossis 532 nm feem ntau. siv rau kev kos cov khoom siv hlau). Tam sim no, UV laser ua tshuab tseem siv tau, uas tuaj yeem ua tiav micron-theem ua, qhov raug siab, tuaj yeem tsim cov khoom siv ultra-fine micro-zero, tuaj yeem siv rau tsawg dua 1 μm qhov chaw ntawm lub laser beam ntawm micro-qhov. ua. Txawm li cas los xij, CO2 lasers feem ntau yog siv rau qhov nruab nrab ntawm 75 thiab 150 hli thiab muaj kev cuam tshuam tsis zoo hauv qhov me me, thaum UV lasers tuaj yeem siv rau qhov txog li 25 hli nrog qhov raug siab thiab tsis muaj qhov tsis zoo. Piv txwv li, nyob rau hauv lub "txias" ua ntawm tooj liab-clad Circuit Court boards nrog UV femtosecond lasers, ib tug kev ntsuas ntsuas yog siv kom tau qhov zoo tshaj plaws txheej txheem tsis, thiab cov xaiv etching zog yog ces siv mus cuag high-zoo, high-efficiency. micro kab etching ntawm tooj liab-clad nto nrog ib kab dav ntawm 50 μm thiab ib kab suab ntawm 20 μm.
3.4 Kev ua thiab kev npaj ntawm cov khoom siv kho qhov muag
Nyob rau hauv lub hnub nyoog ntawm cov ntaub ntawv technology thiab kev loj hlob sai ntawm niaj hnub kev lag luam, yuav tsum tau tsim ntau yam kev sim tshuab nyob rau hauv ib tug me me qhov chaw thiab ua kom tiav ntau functions yuav tsum tau ceev ceev txoj kev loj hlob ntawm cov ntaub ntawv technology thiab, tseem ceeb tshaj, zus tau tej cov me me, miniaturized thiab tag nrho. cov khoom siv ua haujlwm uas tsuas yog ua cov khoom siv tshuaj lom neeg ntawm cov khoom siv. Nws muaj cov ntawv thov tseem ceeb thiab kev tshawb fawb muaj txiaj ntsig hauv kev ua tub rog radar kev sib txuas lus, kev kho mob, aerospace thiab biochemistry. Ntau qhov tob txiav thiab optimization thiab kev tshawb fawb thiab kev loj hlob ntawm daim ntaub ntawv ntawm micro-optical Cheebtsam ntawm nanoscale yog ua tau, transforming lub zog thiab cov khoom ntawm tsoos optical Cheebtsam. Micro-optics muaj qhov zoo ntawm kev ua kom yooj yim rau cov khoom loj, yooj yim rau array, me me, lub teeb thiab hloov tau, tab sis cov khoom tseem ceeb yog quartz iav. Quartz iav yog qhov ua rau tawg thiab tawg thaum lub sijhawm thov thiab tuav thiab yog cov khoom siv tawv thiab nkig, uas txo qis nws cov khoom kho qhov muag. Raws li qhov tshwm sim, UV laser txoj kev sau ntawv ncaj qha "txias" ua cov thev naus laus zis tau txhim kho qhov ua tau zoo ntawm cov khoom siv kho qhov muag, ua rau kev ua haujlwm sai ntawm micro-optical Cheebtsam nrog siab precision thiab zoo qauv yam tsis muaj kev puas tsuaj rau cov khoom, thiab tso cai rau kev hloov pauv ntawm cov khoom siv kho qhov muag. loj thiab me batch nrog cov kev xav tau sib txawv. Thaum lub koom haum tshawb fawb txawv teb chaws tau kawm txog UV-UV kev ua haujlwm ntawm silicon wafers ua ntej, kev tshawb fawb hauv tsev ntawm silicon wafer txiav tshuab thiab facets tau ua tom qab pib lig. Optimized txiav ntawm peb silicon wafers ntawm tib cov khoom (0.18 mm, 0.38 mm thiab 0.6 mm) nrog qhov tsawg kawg nkaus aperture ntawm 45 μm thiab machining raug ntawm 20 μm, qhia tsis muaj kab nrib pleb hauv cov khoom, tsawg thermal cuam tshuam ntawm laser thiab tsawg spatter.
3.4. UV laser siv nyob rau hauv semiconductor kev lag luam
Micromachining ntawm cov khoom siv semiconductor nrog UV lasers tau txais kev mloog ntau ntxiv hauv xyoo tas los no. Ntau txhiab tus neeg sib xyaw ua ke muaj cov khoom siv sib xyaw ua ke, yog li qee cov ntaub ntawv siab xws li silicon thiab lwm cov semicond|Cov lus qhia nyias nyias ntawm lub cev ua ntej UV laser thiab kawm cov spectral zog ntawm zaj duab xis, thaum lub UV laser kuj tuaj yeem ua rau kev siv lub teeb lub zog ntawm cov ntaub ntawv silicon, tab sis kuj ua rau cov silicon deg microstructure hloov, uas yog qhov zoo rau kev tsim cov hnub ci vaj huam sib luag, xws li ob- dimensional micro-grating, thiab lwm yam.
4. Cov lus xaus
Los ntawm ntau caum xyoo ntawm txoj kev loj hlob thiab kev tshawb fawb, thev naus laus zis thiab kev siv ntawm UV lasers tau dhau los ua ntau thiab dav thiab paub tab, thiab nws cov yam ntxwv zoo tshaj plaws "txias" ua tshuab micro-txheej txheem thiab kho qhov chaw yam tsis hloov lub cev ntawm cov khoom, thiab yog dav siv nyob rau hauv ntau yam lag luam thiab kev lag luam xws li kev sib txuas lus, optics, tub rog, kev tshawb nrhiav txhaum cai thiab kev kho mob. 5G era, piv txwv li, yog tsim kev thov rau FPC ua. Nrog rau kev txhim kho ntxiv ntawm 5G kev lag luam thiab nrhiav kev hloov pauv OLED cov lus qhia los ntawm cov tuam txhab hluav taws xob loj, qhov kev thov rau FPC hloov pauv hloov hluav taws xob tau loj hlob sai, thiab nrog nws, qhov kev thov rau UV lasers. Cov qauv no yuav cia siab tias yuav ua rau muaj kev txhim kho sai ntawm UV thev naus laus zis nws tus kheej kom ua tiav qhov kev sib tw ntau dua hauv lub zog thiab mem tes dav, nrog rau cov chaw tshiab ntawm daim ntawv thov. Daim ntawv thov ntawm UV laser tshuab tau ua precision txias ua cov ntaub ntawv xws li FPC ua tau, thaum maj mam nce nyob rau hauv FPC tau tsav lub deployment ntawm 5G, uas tsis tshua muaj latency yam ntxwv muab unlimited lub sij hawm rau cov tshiab nthwv dej ntawm kev loj hlob technology xws li huab technology, lub Internet ntawm Yam, tsis muaj kev tsav tsheb thiab VR. Qhov no yog qhov tseeb lub tswv yim ntxiv, thiab cov thev naus laus zis tshiab thiab kev siv yuav nws thiaj li tsav kev txhim kho ntxiv ntawm UV lasers.
Raws li ntau thiab ntau dua tshiab zaus ob npaug ntawm cov muaju thiab tau txais xov xwm tawm, qhov luv dua lub wavelength lub zog siab dua ntawm UV laser yuav raug siv yav tom ntej hauv kev lag luam ntau ntxiv los txhawb txoj kev loj hlob ntawm txhua qhov chaw ntawm lub neej, UV lasers hauv kev ua haujlwm. ntse dua, ua haujlwm tau zoo thiab raug, siab dua tus nqi, kev ruaj ntseg siab yog qhov sib txawv ntawm kev txhim kho yav tom ntej.
