Tsis ntev los no, Zhang Junyong pab neeg ntawm Lub Tsev Haujlwm Sib Koom Tes ntawm High Power Laser Physics, Shanghai Institute of Optics thiab Precision Machinery (SIPM), Suav Academy of Sciences (CAS), nrog rau Prof. Yongpong Zhao pawg ntawm Harbin Institute of Technology (HIT), tau ua thawj qhov kev vam meej hauv array tswj thiab shaping ntawm EUV thiab mos x-ray tsom optical teb, uas tau daws qhov teeb meem ntawm kev tiv thaiv kev txwv rau diffractive imaging thiab interferometric sensing nyob rau hauv huab ultraviolet (UV) thiab x-ray wavelength bands. Cov txiaj ntsig tau luam tawm raws li "Dawb lub teeb-zoo tsom hauv huab cua-ultraviolet hluav taws xob nrog tus kheej-evolutionary photon sieves" hauv Kev Tshaj Tawm Txog Kev Tshawb Fawb.
Txij li thaum qhov kev tshawb pom ntawm x-rays los ntawm Roentgen, high-coherence luv-yoj lub teeb qhov chaw thiab high-kev ua tau zoo luv-yoj tsom xam cov ntsiab lus yog ob tug fwj txwv txwv txoj kev loj hlob ntawm x-ray science. Synchrotron hluav taws xob thiab dawb-electron lasers, piv txwv li, tsom mus rau cov mos mos thiab tawv x-ray bands, thaum tso ntshav plasma lasers npog lub ultraviolet huab cua thiab ib feem ntawm cov mos x-ray band. Raws li qhov teeb meem ntawm high-coherence luv-yoj lub teeb qhov chaw yog alleviated, muaj ib qho kev xav tau ceev dua rau kev tsom xam cov cuab yeej rau EUV thiab x-rays. Thaum cov ntaub ntawv qhia tias muaj zog nqus nyob rau hauv EUV thiab mos x-ray bands thiab muaj zog nkag mus rau hauv lub zog x-ray band, Fresnel waveband nplooj ntawv tsuas yog kis tau tus mob tsom cov ntsiab lus muaj nyob rau tam sim no. Shanghai Institute of Optical Machinery (SIOM) yog lub tsev ua ntej hauv Suav teb los koom nrog kev tsim thiab siv cov khoom siv x-ray, tshwj xeeb tshaj yog nyob rau hauv lub hauv paus ntawm ib txwm ribbon daim ntawv thiab photon sieve, SIOM yog thawj zaug los tawm tswv yim thiab tsim ntau yam. ntawm multifocal photon sieves nrog ntau qhov kev ua haujlwm kho qhov muag, xws li Grecian ladder photon sieve thiab Fermat helix photon sieve, thiab lwm yam, uas muaj peev xwm ua tau raws li cov kev xav tau ntawm cov duab luv-yoj diffraction thiab cuam tshuam sensing.
Piv nrog waveband slices nrog ib tug tsawg tus naj npawb ntawm rings, lab thiab billions ntawm me me apertures muab ze li ntawm unlimited tsim kev ywj pheej rau qhov tshwm sim ntawm haumxeeb photon sieves, thiab cov pab pawg neeg siv optimization algorithms los tsim ib tug self-evolving photon sieve, uas ua tiav tsom optical. teb array modulation thiab shaping hauv EUV band. Hauv kev sim, peb tau ua kom zoo dua 46.9nm laser los ntawm kev tso tawm ntshav plasma laser 69.8nm, 46.9nm thiab 13.5nm rau irradiate lub photon sieve, kaw lub tsom teeb pom kev zoo nrog photoresist, thiab nyeem cov ntaub ntawv los ntawm atomic force microscope, thiab tau ua tiav. ob peb txheej txheej txheej nrog 100nm tsom, thiab cov txiaj ntsig tau ua raws li theoretically xam tsom nyob rau hauv qhov kev txwv diffraction.Lub realization ntawm kev hloov kho thiab shaping ntawm EUV thiab x-ray arrays muab lub sijhawm rau cov qauv lithography ntawm luv yoj. thiab dej qhov rais ntu rau hauv vivo lom cell imaging, interferometric diagnostics ntawm laser plasma, x-ray microscopy thiab coherent diffraction imaging, thiab lwm yam. Lub realization ntawm EUV thiab x-ray array modulation thiab shaping expands tshiab txoj kev loj hlob qhov chaw.
Txoj haujlwm no tau txhawb nqa los ntawm National Natural Science Foundation ntawm Tuam Tshoj, Shanghai Young Scientists Yangfan Program, thiab Chav Kawm A Strategic Pilot Project ntawm Suav Academy ntawm Sciences.
Fig. 1 Lub teeb pom kev zoo ntawm ultraviolet (EUV) lub teeb, (a) AFM daim ntawv qhia ntawm qhov chaw focal, (bc) lub teeb siv thiab theem ntawm simulated focal chaw
Fig. 2 Multilayer arrayed qhov chaw rau huab ultraviolet teeb
