Tsis ntev los no, ib pab neeg tshawb fawb Wei Chaoyang los ntawm Precision Optical Manufacturing thiab Inspection Center ntawm Shanghai Institute of Optics thiab Precision Machinery (SIPM) ntawm Tuam Tshoj Academy of Sciences (CAS) tau paub txog cov fabrication ntawm high UV laser-kev puas tsuaj fused silica Cheebtsam raws li ntawm qhov tsis xws luag characterization thiab tshem tawm cov txheej txheem ntawm CO2 laser. Cov txiaj ntsig kev tshawb fawb tau luam tawm hauv Lub Teeb: Advanced Manufacturing.
Qhov teeb meem ntawm UV laser-induced kev puas tsuaj rau fused silica Cheebtsam tau nruj heev rau txoj kev loj hlob ntawm high-power laser systems. Kev sib cuag tam sim no thiab polishing txheej txheem inevitably muaj kev ua tsis xws luag, uas yog qhov nyuaj rau tshem tawm tag nrho los ntawm kev ua haujlwm tom qab, txo qhov kev ua tau zoo thiab lub neej ntawm fused silica Cheebtsam.
Raws li lub microsecond pulsed laser low-stress uniform ablation technology, pab neeg tshawb fawb tau npaj ib txoj kev laser chromatography ablation los ua tus yam ntxwv ntawm subsurface defects, thiab ua ke nws mus rau kev tshem tawm sai ntawm cov ntaub ntawv kom ua tiav qhov kev tshem tawm ntawm subsurface defects ntawm kev sib tsoo theem. Tom qab ntawd, lub laser conformal tu txoj kev tau siv los ntxuav cov redeposited contaminants ntawm lub ablated nto, thiab laser yaj polishing yog siv los du lub ablation trajectory, realizing lub CO2 laser tag nrho-txuas txuas saj zawg zog ua ntawm fused silica Cheebtsam. Piv nrog rau cov txheej txheem ib txwm ua, CO2 laser ua txuas txuas tuaj yeem cuam tshuam qhov kev qhia txog kev ua haujlwm tsis zoo thiab yog li paub txog kev npaj cov fused silica Cheebtsam nrog kev puas tsuaj ntau dua. Lub tswv yim laser-based defect characterization thiab tshem tawm txoj kev muab cov cuab yeej tshiab rau kev kawm ntawm subsurface defects thiab tsim cov tswv yim ntawm kev tawm tsam, thiab tseem muab lub tswv yim tshiab rau kev ua haujlwm qis ntawm fused silica Cheebtsam.
Txoj haujlwm no tau txais kev txhawb nqa los ntawm National Key Research thiab Development Program ntawm Tuam Tshoj, Shanghai Yangfan Program, National Natural Science Youth Fund, Shanghai Natural Science Foundation, Astronomy Joint Fund thiab Young Innovation Promotion Association ntawm Suav Academy of Sciences.
Kev nce qib hauv laser-pab fabrication ntawm fused silica Cheebtsam nrog siab tiv thaiv UV laser puas ntawm Shanghai Institute of Optics thiab Mechanics (SIOM)

Fig. 1 (a) Cov txheej txheem sib txuas; (b) CO2 laser ua txuas; (c) 3D full-calibre subsurface defect characterization method
Ua ntej hauv laser-pab fabrication ntawm fused silica Cheebtsam nrog siab UV laser kev puas tsuaj kuj ntawm SIPM.

Fig. 2 Kev sib piv ntawm kev puas tsuaj ntawm cov qauv thiab cov qauv siv laser: (a) 1- ntawm -1 kev puas tsuaj tshwm sim (355 nm, 8.3 ns); (b) raug puas tsuaj morphology.





