Laser Hloov Photolithography txo cov nqi tsim khoom ntawm Ultra-nto

Cov kws tshawb fawb ntawm Moscow Institute of Electronics Technology, ib lub tsev kawm ntawv tshawb fawb hauv xeev Lavxias, tau tsim cov thev naus laus zis tshiab los tsim cov khoom siv rau cov ntaub ntawv qhia cov khoom siv laser pulses es tsis txhob lithography. Qhov no yuav ua kom txo qis ntawm cov nqi tsim khoom rau cov khoom siv tom ntej thiab ultra-nto rau ntau lub tshuab kho qhov muag. Cov kev tshawb pom tau luam tawm nyob rau hauv qhov teeb meem tshiab ntawm Applied Surface Science.
Hypersurfaces yog cov qauv nrog cov qauv ntu uas tuaj yeem siv los tswj cov hluav taws xob thiab lub teeb tsis muaj zog. Rau lub hauv paus no, cov khoom siv dielectric thiab nws yog xim hlau nrog rau cov ntaub ntawv hloov theem tuaj yeem siv tau. Thiab cov ntaub ntawv hloov theem tuaj yeem hloov lub xeev theem thiab yog li cov khoom uas nyob ntawm cov hluav taws xob sab nraud.
Raws li lub hauv paus ntawm hypersurfaces ua los ntawm cov theem hloov khoom siv GST (cov khoom ntawm germanium-antimony-tellurium system), cov kws tshawb fawb tau tsim cov khoom siv compact tshiab uas tuaj yeem tso saib cov ntaub ntawv nrog kev pab ntawm lub teeb tsis muaj zog. Cov no suav nrog ultra-thin zaub, augmented thiab virtual reality headsets, thiab holographic projectors. Txawm li cas los xij, cov txheej txheem ntawm nanostructuring nyias-zaj duab xis nto los hloov lawv mus rau hauv ntau qhov chaw tau ua tiav los ntawm kev siv zog siv zog thiab kim photolithography. Qhov tsim nyog super-nto duab yog thawj zaug tsim ntawm tus qauv (qhov ncauj qhov ntswg) thiab tom qab ntawd xa mus rau qhov khoom ntawm qhov kev daws teeb meem xaiv.
Txhawm rau txo tus nqi ntawm cov qauv tsim cov yeeb yaj kiab thiab ua kom cov txheej txheem nrawm dua, Moscow lub koom haum ntawm Electronics thiab Technology, nrog rau lwm lub koom haum tshawb fawb, siv laser pulses es tsis txhob photolithography. Raws li cov kws tshawb fawb, nrog kev pab ntawm laser irradiation nyob rau hauv ultrashort pulses, xaj nanostructures tuaj yeem tsim tau ntawm GST sai dua thiab yooj yim dua. Txhawm rau tsim ib qho kev txiav txim saum npoo, cov txheej txheem ua ntej yog siv, uas cov khoom siv yav dhau los raug rhuav tshem nyob rau hauv lub xub ntiag ntawm lub laser. Lub ntsiab kom zoo dua ntawm kev daws yog tias cov mem tes ua rau tus kheej lub koom haum ntawm cov qauv ntawm qhov chaw. Nyob ntawm qhov kev siv thiab tus naj npawb ntawm cov pulses, 3 ntau hom qauv yuav raug tsim, qhov txaus nyiam tshaj plaws ntawm cov txheej txheem nanospheres ntawm tib lub sijhawm. Cov duab no nyuaj rau tsim thiab muaj lub vojvoog txog li 150 nanometers.
Yav dhau los, nws yog tsis yooj yim sua kom tau lawv nyob rau hauv cov ntaub ntawv no yam tsis muaj kev siv cov tswv yim ntxiv, tab sis tam sim no, tsis muaj cov cuab yeej xav tau kom tau txais nanospheres ntawm tib hom, tshwj tsis yog rau cov cuab yeej laser thiab zaj duab xis nws tus kheej. Cov spheres no yog tsim los ntawm kev lwj ntawm melted filaments. Nyob rau hauv cov ntaub ntawv no, qhov nce nyob rau hauv lub zog ntawm laser irradiation ua rau ib tug loj hloov txheej txheem, uas ua rau lub transformation ntawm nanosphere chains mus rau lub sij hawm. Cov txheej txheem saum toj no ua rau nws muaj peev xwm los tsim cov nanolenses thiab kho qhov muag nanogratings, uas yuav tsum tau txuas ntxiv nrog ntau lub tshuab kho qhov muag, suav nrog cov ntaub ntawv tso saib.