Thaum Lub Yim Hli 9, 2022, Thawj Tswj Hwm Joe Biden tau kos npe rau Chip thiab Science Act. Raws li $ 54.2 nphom kev txhawb nqa rau Asmeskas kev lag luam semiconductor, daim nqi kuj tau hais meej meej tias "cov tuam txhab nyiaj pab tsis tuaj yeem tsim kev nthuav dav tseem ceeb hauv Suav teb thiab cov teb chaws cuam tshuam txog kev lag luam semiconductor rau kaum xyoo." Nyob rau tib lub sijhawm, Tebchaws Meskas kuj tau tsim cov chip alliance nrog lwm lub tuam txhab kev lag luam semiconductor xws li Kaus Lim Qab Teb, nrog kev ua haujlwm tsis tu ncua.
Kev txhim kho yav tom ntej ntawm Tuam Tshoj cov chips hauv tsev los hloov cov chips txawv teb chaws tau dhau los ua qhov xaus, cov ntawv thov kev lag luam cuam tshuam yog xav tau kev txhim kho sai. Dej poob laser raws li lub teb chaws laser tu lub teb thawj coj thiab pioneer, tab sis kuj nyob rau hauv lub nruam peev nyob rau hauv kev tshawb fawb thiab kev loj hlob cov nqi, mus tshawb nrhiav tau ntawm daim ntawv thov ntawm laser ntxuav tshuab nyob rau hauv lub nti manufacturing kev lag luam, vam tias yuav accelerate txoj kev loj hlob ntawm Tuam Tshoj lub semiconductor. kev lag luam los ua lawv me ntsis.
Hauv kev lag luam chip manufacturing, semiconductor tu thoob plaws hauv kev lag luam, cov kauj ruam suav rau ntau dua 30 feem pua ntawm tag nrho cov txheej txheem tsim khoom, yog cov txheej txheem tseem ceeb cuam tshuam rau qhov zoo ntawm wafers thiab chip kev ua tau zoo, nrog rau qhov chaw lag luam ntau dua 40 billion. Txawm hais tias nyob rau hauv qhov tseem ceeb thiab cov khoom lag luam nplai tsis yog qhov tseem ceeb raws li lithography thiab lwm yam khoom siv tseem ceeb, tab sis raws li kev sib txuas tsis tuaj yeem hloov mus rau cov khoom siv nti tawm thiab cov txiaj ntsig kev lag luam ntawm cov tuam txhab muaj kev cuam tshuam tseem ceeb.
Tam sim no, raws li cov txheej txheem tsim chip txuas ntxiv txhim kho qib ntawm kev ua kom zoo dua qub, cov kev cai rau kev tswj hwm ntawm wafer nto cov kab mob txuas ntxiv txhim kho, tom qab txhua kauj ruam ntawm lithography, etching, deposition thiab lwm cov txheej txheem rov ua dua, yuav tsum tau ua cov txheej txheem ntxuav, nws paub tseeb tias cov txheej txheem ntxuav yog feem ntau ntawm tag nrho cov txheej txheem, thiab yuav nce ntxiv rau yav tom ntej.
Thaum cov txheej txheem node nce mus txog 10nm hauv 2018, silicon wafer yuav tsum tau ua kom huv si ncav cuag ib qhov siab: cov khoom seem thiab COP ntom ntom tsawg dua 0.1 / c㎡, qhov tseem ceeb ntawm cov hlau hlau ntom ntom tsawg dua 2.5 * 10⁹at /c㎡. Tam sim no, ob peb lub lag luam hauv tsev tuaj yeem ua 7nm txheej txheem ntawm node, thiab zoo li TSMC, Samsung, thiab lwm yam tuaj yeem tsim cov khoom loj 3nm, hauv kev cuam tshuam rau 2nm, cov kev xav tau ntawm kev tu yuav tsuas yog siab dua.
Tam sim no wafer tu txoj kev yog immersion, rotary tsuag, mechanical txhuam, ultrasonic, megasonic, plasma, roj theem, beam flow, thiab lwm yam, feem ntau yog siv ib tug ua ke ntawm ntub tu thiab qhuav tu, ntub tu yog lub ntsiab, tab sis yuav muaj. me ntsis kev puas tsuaj rau cov khoom siv, xws li lub cim ntawm kev puas tsuaj, COP (100nm los yog kab noj hniav), thiab lwm yam., kev tu kom qhuav raws li kev siv tshuab ntxhua khaub ncaws hauv cov kab ntau lawm ntawm daim ntawv thov, Cov Kev Pom Zoo tau txais txiaj ntsig ntau dua.
Laser tu tshuab raws li ib tug qhuav tu, rau lub wafer ntau lawm txheej txheem ntawm deg paug - xws li plua plav hais, hlau, organic teeb meem, oxides, thiab lwm yam. muaj ib tug zoo tu nyhuv, thiab qhov tseeb ntawm cov nyhuv yog ntau controllable, tab sis muaj tsis muaj kev paub tab ntau hauv cov ntawv thov piv txwv, dej poob laser los qhia peb wafer nto Roughing txheej txheem qhia, cia siab tias yav tom ntej ntawm laser tu tuaj yeem koom nrog hauv cov txheej txheem tsim chip.
Raws li ib qho kev lag luam tu tshuab, laser tu tshuab tseem tsis tau hnov hauv Suav teb ua piv txwv ntawm kev siv tswv yim hauv cov txheej txheem ntawm wafers. Tab sis nyob rau hauv qhov kev ntsuam xyuas ua ntej tuaj yeem pom, kev ntxuav laser hauv semiconductor teb tseem muaj kev cia siab, ua ntej tsis muaj leej twg tau ua qhov kev sim ua ntej. Peb yuav txuas ntxiv tshawb nrhiav qhov ua tau ntawm laser tu hauv daim ntawv thov chip manufacturing tom qab, los pab txhim kho Tuam Tshoj txoj kev lag luam semiconductor.
