Cov kab mob me me ntawm cov kab hluav taws xob hluav taws xob tuaj yeem txo cov hluav taws xob ua haujlwm thiab ua rau cov hluav taws xob hluav taws xob puas tsuaj. Nrog rau kev txhim kho thev naus laus zis, cov khoom siv hluav taws xob, cov khoom siv microelectronic tau txais me me thiab me me, cov khoom uas yuav tsum tau ntxuav tau me dua thiab me dua, qhov kev tu tsis yooj yim yog loj, tsoos dej ntxuav thiab ntxuav ultrasonic muaj lawv tus kheej drawbacks, laser tu coj tshiab. vam thiab dhau los ua txoj kev tu zoo tshaj plaws.
Polyimide zaj duab xis yog cov khoom tseem ceeb hauv cov khoom siv hluav taws xob, nws yog cov khoom siv hluav taws xob rau cov qauv sib txuas sab hauv ntawm ntau txheej txheej encapsulated films ntawm kev kub ceev, siab ceev hluav taws xob Cheebtsam, tab sis nws yog feem ntau them nrog cov khoom paug, xws li titanium hais, chromium hais. , tungsten hais, nickel particles, thiab lwm yam. Cov kab mob no yuav tsum tau muab ntxuav kom huv si kom paub meej tias cov yeeb yaj kiab polyimide ua haujlwm zoo. Ntxuav polyimide zaj duab xis, siv excimer laser, xaiv lub wavelength ntawm 235nm laser, mem tes 20ns, laser zog ceev ntawm 80mj / cm2, siv automated neeg hlau txoj kev ua hauj lwm, tu efficiency siab heev, tom qab ntxuav tau pom zoo tu nyhuv, siv lub spectrometer mus ntes. Kev tshem tawm cov kab mob sib kis ntau dua 95 feem pua, tau mus txog tus qauv tsim nyog, kev ua haujlwm huv yog siab.
Muaj ntau ntau lwm yam kev siv laser hauv kev siv hluav taws xob hauv hluav taws xob tu, xws li kev tu vaj tse hauv hluav taws xob hauv hluav taws xob, silicon wafer tu, kev sib txuas hauv hluav taws xob, kev ntxuav cov hluav taws xob hluav taws xob, kev tu cov khoom siv optoelectronic, thiab lwm yam. Cov ntaub ntawv no nrog kev txhim kho kev tshawb fawb thiab thev naus laus zis. , kev sib koom ua ke ntau dua, ntau thiab ntau tus pins, qhov tau txais me me, kev tu ib txwm ua haujlwm nyuaj, laser tu vim muaj qhov raug siab, yooj yim rau kev khiav lag luam, kho tsis tau, tu efficiency thiab lwm yam zoo, zoo tshem tawm plua plav, roj. , oxide thiab lwm yam khoom nyob rau saum npoo ntawm cov khoom siv hluav taws xob, txhim khu kev ruaj ntseg ntawm cov khoom siv hluav taws xob. Laser tu muab cov cuab yeej siv tau zoo thiab txhim khu kev qha rau microelectronics kev lag luam uas cov cuab yeej loj me me thiab cov khoom zoo tsis yooj yim ntxuav. Nyob rau tib lub sij hawm laser tu tsis muaj nyob rau cov khoom siv substrate hnav thiab corrosion, nyob rau hauv txoj kab nrog ib puag ncig yuav tsum tau, muaj peev xwm ua hauj lwm nyob rau hauv ib tug nqaim qhov chaw, yog unmatched los ntawm lwm yam kev tu.
Laser tu ua tau raws li qhov yuav tsum tau ntawm kev tiv thaiv ib puag ncig, raws li cov kev xav tau ntawm kev txhim kho kom ruaj khov, vim tias tus nqi ntawm kev tu laser tau qis dua thiab qis dua, laser tu cov khoom siv hluav taws xob tau txais los ntawm ntau thiab ntau lub lag luam.
Ua ntej xyoo 2016, tus nqi ntawm laser tu ntawm cov khoom siv hluav taws xob yog 20 npaug ntawm tus nqi ntawm cov dej ib txwm siv thiab tshuaj ntxuav, nrog rau kev txhim kho laser tu tshuab thiab laser tu cov cuab yeej hauv xyoo tas los no, tus nqi txo, kev tu cov nqi tam sim no ze rau cov tsoos. kos nws.
